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XR66系列Back
Model features
Name :Regulator for Semiconductor Industry
Model No.:
Overview:
This compact sized regulator is designed for semiconductor production equipment.
Feature:
Realizing a large flow rate of 10 L/min;
The contact gas part is finished with ultra clean (UC) treatment;
The contact gas part has no leak and no particles will be made.
Specification
External Dimensions
Model number configuration
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